The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Jun. 19, 2012
Takuo Kaitoh, Mobara, JP;
Takeshi Kuriyagawa, Mobara, JP;
Ryou Sakata, Mobara, JP;
Osamu Karikome, Katsuura, JP;
Timothy J. Brosnihan, Natick, MA (US);
Takuo Kaitoh, Mobara, JP;
Takeshi Kuriyagawa, Mobara, JP;
Ryou Sakata, Mobara, JP;
Osamu Karikome, Katsuura, JP;
Timothy J. Brosnihan, Natick, MA (US);
Pixtronix, Inc., San Diego, CA (US);
Abstract
The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.