The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
May. 23, 2012
Tosiya Asano, Utsunomiya, JP;
Tosiya Asano, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
A positioning apparatus includes a stage, a base, a supporting mechanism which is arranged between the stage and the base and supports the stage with a supporting portion having a spring characteristic, an actuator which is arranged between the stage and the base so as to drive the stage, and a controller which controls the actuator so as to reduce a position error of the stage relative to a target position and cancel at least part of a force acting on the stage due to the spring characteristic of the supporting portion, based on the position error of the stage and a variation of a relative position between the stage and the base.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile