The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2015

Filed:

Apr. 25, 2013
Applicant:

Melexis Technologies NV, Tessenderlo, BE;

Inventors:

Laurent Otte, Brussels, BE;

Appolonius Jacobus Van Der Wiel, Duisburg, BE;

Assignee:

Melexis Technologies NV, Tessenderlo, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01L 19/00 (2006.01); G01L 19/04 (2006.01); G01L 19/14 (2006.01);
U.S. Cl.
CPC ...
H01L 29/84 (2013.01); B81C 1/00158 (2013.01); B81B 2201/0264 (2013.01); G01L 19/0069 (2013.01); G01L 19/04 (2013.01); G01L 19/143 (2013.01);
Abstract

A pressure sensor system comprising a pressure sensor chip is disclosed. The pressure sensor chip comprises a sensing side where pressure sensing is performed and one or more interconnections where electrical connections are made at the other side of the chip. The pressure sensor comprising an integrated circuit () forming a substrate, the substrate comprising a membrane shaped portion adapted for being exposed to the pressure, the integrated circuit () comprising both pressure signal sensing components and pressure signal processing components.


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