The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Jul. 22, 2011
Paul A. Hoisington, Hanover, NH (US);
Jeffrey Birkmeyer, San Jose, CA (US);
Andreas Bibl, Los Altos, CA (US);
Mats G. Ottosson, Saltsjo-Boo, SE;
Gregory DE Brabander, San Jose, CA (US);
Zhenfang Chen, Sunnyvale, CA (US);
Mark Nepomnishy, San Jose, CA (US);
Shinya Sugimoto, San Jose, CA (US);
Paul A. Hoisington, Hanover, NH (US);
Jeffrey Birkmeyer, San Jose, CA (US);
Andreas Bibl, Los Altos, CA (US);
Mats G. Ottosson, Saltsjo-Boo, SE;
Gregory De Brabander, San Jose, CA (US);
Zhenfang Chen, Sunnyvale, CA (US);
Mark Nepomnishy, San Jose, CA (US);
Shinya Sugimoto, San Jose, CA (US);
FUJIFILM Corporation, Tokyo, JP;
Abstract
Processes for forming an actuator having a curved piezoelectric membrane are disclosed. The processes utilize a profile-transferring substrate having a curved surface surrounded by a planar surface to form the curved piezoelectric membrane. The piezoelectric material used for the piezoelectric actuator is deposited on at least the curved surface of the profile-transferring substrate before the profile-transferring substrate is removed from the underside of the curved piezoelectric membrane. The resulting curved piezoelectric membrane includes grain structures that are columnar and aligned, and all or substantially all of the columnar grains are locally perpendicular to the curved surface of the piezoelectric membrane.