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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8968829 B1

PDFFull Text
Expired
Date of Patent:
Mar. 03, 2015

Filed:

Aug. 24, 2010

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Applicants:

Jae-kwang Ryu, Yongin, KR;

Hyun-sook Park, Yongin, KR;

Yun-mi Lee, Yongin, KR;

Jong-heon Kim, Yongin, KR;

Sang-soo Kim, Yongin, KR;

Ji-sook OH, Yongin, KR;

Inventors:

Jae-Kwang Ryu, Yongin, KR;

Hyun-Sook Park, Yongin, KR;

Yun-Mi Lee, Yongin, KR;

Jong-Heon Kim, Yongin, KR;

Sang-Soo Kim, Yongin, KR;

Ji-Sook Oh, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:

Christie Parker & Hale, LLP

Primary Examiner:

Joseph Miller, Jr

Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 51/56 (2006.01); C23C 14/24 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01); C23C 14/56 (2006.01); H01L 27/32 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); C23C 14/042 (2013.01); C23C 14/12 (2013.01); C23C 14/562 (2013.01); H01L 27/3244 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01);
Abstract

A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.

Find Patent Forward Citations

Ryu, Jae-Kwang. (2015). Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same (U.S. Patent No. 8968829). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8968829

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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