The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Dec. 14, 2010
Applicants:
John Macneil, Vale of Glamorgan, GB;
Paul George Bennett, Bristol, GB;
Inventors:
John MacNeil, Vale of Glamorgan, GB;
Paul George Bennett, Bristol, GB;
Assignee:
SPP Process Technology Systems UK Limited, Newport, Gwent, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C25B 11/00 (2006.01); C25B 13/00 (2006.01); H01J 27/02 (2006.01); C23C 14/34 (2006.01); C23C 14/46 (2006.01); H01J 37/24 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01J 27/022 (2013.01); C23C 14/3485 (2013.01); C23C 14/46 (2013.01); H01J 37/243 (2013.01); H01J 37/305 (2013.01); H01J 2237/004 (2013.01); H01J 2237/043 (2013.01); H01J 2237/08 (2013.01); H01J 2237/304 (2013.01);
Abstract
This invention relates an ion beam source () for use with a non-electrical conducting target () including a grid () for extracting ions and a power supply for supplying pass power to the grid () to extract the ions.