The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Jul. 25, 2011
Kailash Kiran Patalay, Santa Clara, CA (US);
Kailash Kiran Patalay, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present invention generally relate to methods and apparatus for measuring, calibrating, and controlling substrate temperature during low temperature and high temperature processing. In one embodiment, the method includes epitaxially forming a layer stack on a substrate placed on a support plate, measuring a temperature of the substrate with a first pyrometer disposed over the substrate, measuring a temperature of the support plate with a second pyrometer disposed below the support plate, calibrating the first pyrometer at multiple temperature points based on actual temperature readings of the substrate to generate a first set of calibrated temperature readings associated with the substrate, calibrating the second pyrometer using the set of calibrated temperature readings as a reference to generate a second set of calibrated temperature readings associated with the support plate, and controlling a power supplied to a heat source configured to heat the substrate based on the second set of calibrated temperature readings.