The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Nov. 10, 2010
Applicant:
Paul Vandebeuque, Paris, FR;
Inventor:
Paul Vandebeuque, Paris, FR;
Assignee:
Sagem Defense Securite, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01H 11/00 (2006.01); G01C 19/5691 (2012.01); G01C 19/56 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5691 (2013.01); G01C 19/56 (2013.01);
Abstract
A resonator has a body of silicon-based material with at least one resonant part having at least one portion covered in an electrical conduction layer and at least one portion not covered in a conduction layer. The portion of the resonator not covered in a conduction layer is covered in a passivation layer in such a manner that, in the resonant part, the silicon-based material is completely covered by the conduction layer and by the passivation layer in combination. A vibrating sensor is also provided which includes such a resonator and a method of fabricating the resonator.