The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2015

Filed:

May. 22, 2013
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

Jae-Byum Chang, Cambridge, MA (US);

Hong Kyoon Choi, Cambridge, MA (US);

Adam F. Hannon, Loganville, GA (US);

Caroline A. Ross, Arlington, MA (US);

Karl K. Berggren, Arlington, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); B81C 1/00 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G06F 17/50 (2013.01); B81C 1/00031 (2013.01); B82Y 40/00 (2013.01);
Abstract

This disclosure relates generally to systems and methods of providing standardized topographical configurations for template regions. In one embodiment, a set of array arrangements is selected. Arrays of template structures are then formed on at least one substrate. Each of the arrays is arranged in accordance with an array arrangement in the set of array arrangements such that the arrays correspond surjectively onto the set of array arrangements. After the arrays are formed, a self-assembly material is provided on the arrays. Self-assembly patterns formed by self-assembling material as a result of the arrays may be empirically observed and used to map a set of self-assembly pattern arrangements surjectively onto the set of array arrangements. Using this mapping, a combination of the self-assembly pattern arrangements that match a target pattern arrangement can be used to select a combination of array arrangements from the set of array arrangements for a template region.


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