The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Sep. 30, 2011
Yuji Yamaguchi, Kyoto, JP;
Masao Yamaguchi, Santa Clara, CA (US);
Kentaro Nagai, Kyoto, JP;
Toshiyuki Himi, Kyoto, JP;
Yuji Yamaguchi, Kyoto, JP;
Masao Yamaguchi, Santa Clara, CA (US);
Kentaro Nagai, Kyoto, JP;
Toshiyuki Himi, Kyoto, JP;
Horiba STEC, Co., Ltd., Kyoto-shi, JP;
Abstract
A diagnostic mechanism includes: a flow rate control part configured to control an opening degree of a flow rate control valve provided in a flow passage so that a measurement flow rate value outputted from a flow rate sensor becomes a target flow rate value; an inspection value output part configured to output an inspection value related to a time integral of the measurement flow rate value in a diagnostic period which is defined in correspondence with a part of a period from a time point of closing the flow passage upstream of the flow rate sensor to a time point of expiration of a state that the measurement flow rate value and the target flow rate value are substantially nearly equal; and a diagnosing part configured to compare the inspection value and a predetermined specified value to diagnose whether an abnormality relating to the flow rate sensor is present.