The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Aug. 15, 2012
Sung Min Ahn, Suwon-si, KR;
Min Seop Park, Suwon-si, KR;
Sung Min Ahn, Suwon-si, KR;
Min Seop Park, Suwon-si, KR;
Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;
Abstract
A maskless exposure apparatus which precisely and rapidly measures positions of spot beams of a plurality of optical systems by calculating positions of respective BMSs using a plurality of FMs engraved on an FBA on a movable table. The centers of the respective BMSs are aligned with the centers of random FMs of the plurality of FMs. Thereafter, positions of spot beams irradiated from the plurality of optical systems are quickly and precisely measured using the positions of the respective BMSs and the positions of the FMs measured by the BMSs, thereby more quickly generating mask data to execute maskless exposures.