The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Oct. 12, 2010
Vladimir Bulovic, Lexington, MA (US);
Corinne E. Packard, Lakewood, CO (US);
Vanessa C. Wood, Zurich, CH;
Apoorva Murarka, Cambridge, MA (US);
Gleb Akselrod, Cambridge, MA (US);
Vladimir Bulovic, Lexington, MA (US);
Corinne E. Packard, Lakewood, CO (US);
Vanessa C. Wood, Zurich, CH;
Apoorva Murarka, Cambridge, MA (US);
Gleb Akselrod, Cambridge, MA (US);
Massachusettes Institute of Technology, Cambridge, MA (US);
Abstract
The disclosure is generally directed to fabrication steps, and operation principles for microelectromechanical (MEMS) transducers. In one embodiment, the disclosure relates to a texture morphing device. The texture morphing device includes: a plurality of supports arranged on a substrate to support a deformable mirror; an ITO layer; and a Distributed Bragg Reflector (DBR) layer. A pair of adjacent supports form a cavity with the ITO layer and the deformable mirror. When the height of the cavity changes responsive to an external pressure, the internal reflection within the cavity is changed. The change in the height of the cavity causes the exterior texture to morph. Similar principles are disclosed for constructing sensor and actuators.