The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Jun. 04, 2012
Applicant:
Steven H. Voldman, South Burlington, VT (US);
Inventor:
Steven H. Voldman, South Burlington, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 27/02 (2006.01); H01L 23/48 (2006.01); H01L 23/522 (2006.01); H01L 23/58 (2006.01); H01L 23/60 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0248 (2013.01); H01L 23/481 (2013.01); H01L 23/5225 (2013.01); H01L 23/5227 (2013.01); H01L 23/585 (2013.01); H01L 23/60 (2013.01); H01L 25/0657 (2013.01); H01L 2225/06541 (2013.01); H01L 2924/3011 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A method includes forming an ESD active device on a substrate, forming a ground plane on a backside of the substrate and forming at least one through wafer via electrically connected to a negative power supply of the ESD active device and the ground plane to provide a low series resistance path to the substrate.