The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Dec. 21, 2007
Fokko Pieter Wieringa, Elst, NL;
Norbertus Benedictus Koster, Delft, NL;
Roland Van Vliet, Aalsmeer, NL;
Hubert Adriaan Van Mierlo, Maassluis, NL;
Fokko Pieter Wieringa, Elst, NL;
Norbertus Benedictus Koster, Delft, NL;
Roland van Vliet, Aalsmeer, NL;
Hubert Adriaan van Mierlo, Maassluis, NL;
Abstract
The invention relates to a plasma generator () for cleaning an object. The plasma generator () comprises a plasma chamber () and a support structure () arranged in the plasma chamber for supporting the object () to be cleaned. Further, the plasma generator comprises an electromagnetic shield () counteracting a flow of charged plasma particles flowing from a plasma generating region towards the object, and a plasma source (). In addition, the plasma generator comprises an additional plasma source () to form a composition of plasma sources that are arranged to generate in the plasma generating region plasmas, respectively, that mutually interact during operation of the plasma generator so as to force plasma particles to flow in a diffusely closed flow path.