The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
May. 10, 2011
Uwe Hoffmann, Alzenau, DE;
Jose Manuel Dieguez-campo, Hanau, DE;
Uwe Hoffmann, Alzenau, DE;
Jose Manuel Dieguez-Campo, Hanau, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
Abstract
A process of coating at least one substrate with a plurality of deposition sources, a method of tooling, a carrier unit and a deposition system are described. The systems and methods provide for or allow for exposing a first substrate portionof said at least one substrateto a first deposition sourcethrough an apertureof a carrier unit, depositing a first layerover the first substrate portion, said first layer including material from said first deposition source, varying a relative position between said at least one substrate and said aperture for exposing a second substrate portion of said at least one substrate, or another substrate, to a second deposition source, and depositing a second layerover the second substrate portion, said second layer including material from said second deposition source.