The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
May. 09, 2003
Michael Lizenberg, Geesthacht, DE;
Frank Lewin, Tangstedt, DE;
Hartwig Müller, Lütjensee, DE;
Klaus Vogel, Barsbüttel, DE;
Gregor Arnold, Bodenheim, DE;
Stephan Behle, Hahnheim, DE;
Andreas Lüttringhaus-henkel, Darmstadt, DE;
Matthias Bicker, Mainz, DE;
Jürgen Klein, Mainz, DE;
Marten Walther, Engelstadt, DE;
Michael Lizenberg, Geesthacht, DE;
Frank Lewin, Tangstedt, DE;
Hartwig Müller, Lütjensee, DE;
Klaus Vogel, Barsbüttel, DE;
Gregor Arnold, Bodenheim, DE;
Stephan Behle, Hahnheim, DE;
Andreas Lüttringhaus-Henkel, Darmstadt, DE;
Matthias Bicker, Mainz, DE;
Jürgen Klein, Mainz, DE;
Marten Walther, Engelstadt, DE;
KHS Corpoplast GmbH, Hamburg, DE;
Abstract
Disclosed are a method and a device for plasma treating workpieces (). Said workpiece is inserted into a chamber () of a treatment station (), which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. In order to simultaneously supply at least two chambers with at least one operating means, a flow of the operating means is branched at least once so as to form at least two partial flows ().