The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Jul. 27, 2006
Walter L. Magee, Jr., Manitou Beach, MI (US);
Charlotte Corbett, Harbor Springs, MI (US);
Walter L. Magee, Jr., Manitou Beach, MI (US);
William J. Corbett, Harbor Springs, MI (US);
Silbond Corporation, Weston, MI (US);
Abstract
A stable suspension of ethylpolysilicate nanoparticles having a size of between about 5 nm and 120 nm are in water and stabilized with between about 0.05 and 5 weight percent tetraalkylammonium hydroxide. The particles are between about 95% and 99.5% hydrolyzed and have superior removal rates when used in chemical mechanical polishing. A process for making ethylpolysilicate nanoparticles includes the step of adding reverse osmosis water and 25% tetramethylammonium hydroxide and ammonium hydroxide to a reactor, agitating the mixture and heating the mixture to about 80° C. Tetraethylalkoxy silane is added to the mixture and the mixture stirred and hydrolyzed. Ethanol is then removed. The mixture was then subjected to a vacuum to remove additional distillate. The material left in the reactor was then transferred to a plastic drum.