The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Feb. 07, 2012
Applicant:
Yuichi Hamada, Annaka, JP;
Inventor:
Yuichi Hamada, Annaka, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 23/16 (2006.01); G03B 11/04 (2006.01); G02B 5/22 (2006.01); G02B 7/00 (2006.01); G03F 7/20 (2006.01); G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
G03F 7/70983 (2013.01); G03F 1/64 (2013.01);
Abstract
There is provided a pellicle which comprises a pellicle frame having eight or more jig holes in the outer wall for receiving jig pins of pellicle handling jigs; the jig holes are arranged such that the pellicle frame can be held by two or more pellicle handling jigs at the same time, and preferably the jigs holes are on the outer walls of the all frame bars so that the pellicle frame can be held by the jigs at both the longer frame bars and the shorter frame bars at the same time.