Mos electronic article surveillance, rf and/or rf identification tag/device, and methods for making and using the same

Abstract

A RF MOS- or nonlinear device-based surveillance identification tag, and methods for its manufacture and use. The tag includes an inductor, a capacitor plate coupled to the inductor, a dielectric film on the capacitor plate, a semiconductor component on the dielectric film, and a conductor providing electrical communication between the semiconductor component and the inductor. The method of manufacture includes depositing a semiconductor material/precursor on a dielectric film; forming a semiconductor component from the semiconductor material/precursor; forming a conductive structure at least partly on the semiconductor component; and etching the electrically functional substrate to form an inductor and/or a second capacitor plate. The method of use includes causing/inducing a current in the tag sufficient to generate detectable electromagnetic radiation; detecting the radiation; and selectively deactivating the tag. The present invention provides a low cost tag capable of operating at MHz frequencies and in frequency division and/or multiplication modes.