The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2015

Filed:

Apr. 04, 2013
Applicant:

Kaijo Corporation, Tokyo, JP;

Inventors:

Kazunari Suzuki, Hamura, JP;

Ki Han, Hamura, JP;

Assignee:

Kaijo Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/12 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); H01L 21/67051 (2013.01); H01L 21/67057 (2013.01); B08B 3/12 (2013.01); Y10S 134/902 (2013.01);
Abstract

An ultrasonic cleaning device includes an ultrasonic transducer () for providing ultrasonic energy to a propagation liquid (), an ultrasonic propagation tube () for flowing the propagation liquid provided with the ultrasonic energy by the ultrasonic transducer, a holding mechanism disposed below the ultrasonic propagation tube for holding an object to be cleaned (), and a cleaning liquid supply mechanism for supplying a cleaning liquid to a cleaning surface of the object to be cleaned held by the holding mechanism. The ultrasonic propagation tube () is disposed so that a side surface thereof may contact a liquid film () of the cleaning liquid formed on the cleaning surface by supplying the cleaning liquid to the cleaning surface by the cleaning liquid supply mechanism.


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