The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2015

Filed:

Mar. 21, 2012
Applicants:

Toru Saeki, Minato-ku, JP;

Yasumichi Mieno, Minato-ku, JP;

Yuji Urabe, Minato-ku, JP;

Toshio Kamigaki, Minato-ku, JP;

Yoji Masui, Minato-ku, JP;

Inventors:

Toru Saeki, Minato-ku, JP;

Yasumichi Mieno, Minato-ku, JP;

Yuji Urabe, Minato-ku, JP;

Toshio Kamigaki, Minato-ku, JP;

Yoji Masui, Minato-ku, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01); H01L 21/68 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01); Y10S 414/135 (2013.01); Y10S 414/137 (2013.01); Y10S 414/141 (2013.01);
Abstract

A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The link holds a regular circular transport object at its distal end. The apparatus also includes an edge detector, provided on the base member, that detects two edges of the regular circular transport object as the link pivotally rotates with respect to the base member, a pivotal angle detector that detects a pivotal angle of the link with respect to the base member, and a center position calculator that calculates a center position of the regular circular transport object with respect to the link. The calculation is based on two pivotal angles detected by the pivotal angle detector when the edge detector detects the two edges of the regular circular transport object.


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