The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2015

Filed:

May. 21, 2010
Applicants:

Takeshi Arai, Yokohama, JP;

Nobuaki Nakasu, Kawasaki, JP;

Inventors:

Takeshi Arai, Yokohama, JP;

Nobuaki Nakasu, Kawasaki, JP;

Assignees:
Attorney:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); H01L 21/66 (2006.01); G01N 21/95 (2006.01); G01R 31/309 (2006.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); G01N 21/9501 (2013.01); G01R 31/309 (2013.01); G01N 21/956 (2013.01); G01N 2021/9513 (2013.01); H01L 22/12 (2013.01);
Abstract

Provided is a defect correcting device for an electronic circuit pattern, which is capable of making a defect seed obvious, and normalizing a pixel or forming a pixel into a semi-black spot. A defect correcting device for an electronic circuit pattern includes: an imaging unit for irradiating a defective portion of the electronic circuit pattern with irradiation light having a wavelength of a visible light region and a wavelength of an infrared light region, and receiving reflected light having the wavelength of the visible light region and the wavelength of the infrared light region from the electronic circuit pattern; a signal processing unit for extracting the defective portion from a picked-up image, and determining a correcting method; a laser irradiating unit for irradiating the defective portion with laser light; and a correction determining unit for determining success or failure of defect correction before and after laser irradiation.


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