The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Jan. 21, 2009
Applicant:
Joseph Damian Gordon Lacey, Milpitas, CA (US);
Inventor:
Joseph Damian Gordon Lacey, Milpitas, CA (US);
Assignee:
Cavendish Kinetics, Ltd., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81B 3/00 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B81B 3/007 (2013.01); B81B 2201/014 (2013.01); B81B 2203/0118 (2013.01); H01L 41/094 (2013.01);
Abstract
Embodiments discussed herein generally disclose novel alternative methods that can be employed to overcome the gradient stress formed in refractory materials to be used for thin film MEMS cantilever switches. The use of a 'split layer' cantilever fabrication method, as described herein enables thin film MEMS cantilever switches to be fabricated resulting in low operating voltage devices while maintaining the mechanical rigidity of the landing portion of the final fabricated cantilever switch.