The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2015

Filed:

Apr. 07, 2014
Applicant:

Colorado State University Research Foundation, Fort Collins, CO (US);

Inventors:

Walajabad S. Sampath, Fort Collins, CO (US);

Pavel S. Kobyakov, Fort Collins, CO (US);

Kevin E. Walters, Milliken, CO (US);

Davis R. Hemenway, Fort Collins, CO (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/06 (2006.01); H01L 21/00 (2006.01); H01L 21/44 (2006.01); H01L 21/31 (2006.01); H01L 31/18 (2006.01); C23C 14/24 (2006.01); C23C 16/452 (2006.01);
U.S. Cl.
CPC ...
C23C 16/452 (2013.01); H01L 31/1828 (2013.01); C23C 14/243 (2013.01);
Abstract

Systems and methods for depositing complex thin-film alloys on substrates are provided. In particular, systems and methods for the deposition of thin-film CdMTe ternary alloys on substrates using a stacked-source sublimation system are provided, where M is a metal such as Mg, Zn, Mn, and Cu.


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