The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Aug. 15, 2012
Johannes Classen, Reutlingen, DE;
Jochen Reinmuth, Reutlingen, DE;
Sebastian Guenther, Tuebingen, DE;
Pia Bustian-todorov, Reutlingen, DE;
Johannes Classen, Reutlingen, DE;
Jochen Reinmuth, Reutlingen, DE;
Sebastian Guenther, Tuebingen, DE;
Pia Bustian-Todorov, Reutlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A method for manufacturing a micromechanical structure, and a micromechanical structure. The micromechanical structure encompasses a first micromechanical functional layer, made of a first material, that comprises a buried conduit having a first end and a second end; a micromechanical sensor structure having a cap in a second micromechanical functional layer that is disposed above the first micromechanical functional layer; an edge region in the second micromechanical functional layer, such that the edge region surrounds the sensor structure and defines an inner side containing the sensor structure and an outer side facing away from the sensor structure; such that the first end is located on the outer side and the second end on the inner side.