The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2015

Filed:

Aug. 31, 2012
Applicants:

Takaya Yamada, Osaka, JP;

Masashi Kamitani, Osaka, JP;

Inventors:

Takaya Yamada, Osaka, JP;

Masashi Kamitani, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 49/00 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); H01L 21/67109 (2013.01); H01L 21/67766 (2013.01);
Abstract

The vacuum seal unit of a workpiece transfer apparatus includes a plurality of seal rings and a cooling flow passage formed so as to circulate through inside a rotating shaft and a workpiece transfer mechanism. The seal rings adjacent to each other with a spacing therebetween, out of the plurality of seal rings, and the rotating shaft define a first space and a second space independent from each other and respectively surrounding the periphery of the rotating shaft. An end portion of the cooling flow passage communicates with the first space, and the other end of the cooling flow passage communicates with the second space. Even when the rotating shaft is rotating about the axial center, a coolant supplied to the second space can flow through the cooling flow passage and be supplied to the first space, thereby enabling cooling with high efficiency without restriction on the angle of rotation.


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