The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2015

Filed:

Oct. 04, 2013
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Takahiko Yoshizawa, Sakata, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 29/84 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); B81B 7/02 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0058 (2013.01); B81C 1/00325 (2013.01); B81B 7/00 (2013.01); B81B 7/02 (2013.01); B81C 1/00 (2013.01);
Abstract

An electronic device includes a substrate, a sidewall that is disposed on the substrate and forms a cavity, a first layer that is disposed on the sidewall and covers the cavity, a second layer that is formed on the first layer and has a region disposed outside an outline of the first layer in a plan view, a dielectric layer disposed below the region of the second layer disposed outside the outline of the first layer in a plan view, and a functional element disposed inside the cavity.


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Yoshizawa, Takahiko. (2015). Electronic device and its manufacturing method (U.S. Patent No. 8952467). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8952467

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