The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2015

Filed:

Oct. 15, 2012
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Gilberto Curatola, Villach, AT;

Gianmauro Pozzovivo, Villach, AT;

Simone Lavanga, Drobollach, AT;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
Abstract

A compound semiconductor device includes a plurality of high-resistance crystalline silicon epitaxial layers and a plurality of activated dopant regions disposed in a same region of at least some of the epitaxial layers so that the activated dopant regions are aligned in a vertical direction perpendicular to a main surface of the epitaxial layers. The compound semiconductor device further includes an III-nitride compound semiconductor device structure disposed on the main surface of the epitaxial layers. The III-nitride compound semiconductor device structure has a source, a drain and a gate. An electrically conductive structure is formed from the activated dopant regions. The electrically conductive structure extends in the vertical direction through the epitaxial layers with the activated dopant regions toward the III-nitride compound semiconductor device structure, and is electrically connected to the source.


Find Patent Forward Citations

Loading…