The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Feb. 07, 2013
Applicants:
Byoung-kwon Choo, Yongin, KR;
Cheol-ho Park, Yongin, KR;
Kwon-hyung Lee, Yongin, KR;
Sung-chul Pyo, Yongin, KR;
Inventors:
Byoung-Kwon Choo, Yongin, KR;
Cheol-Ho Park, Yongin, KR;
Kwon-Hyung Lee, Yongin, KR;
Sung-Chul Pyo, Yongin, KR;
Assignee:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); B23K 26/06 (2014.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); H01L 21/02675 (2013.01); H01L 21/02532 (2013.01); H01L 21/02691 (2013.01); B23K 26/0656 (2013.01);
Abstract
Laser crystallization equipment includes a laser generator generating a laser beam, the laser beam being directed toward a processing target substrate, and a blade member over the processing target substrate, the blade member being configured to chop the laser beam with a predetermined width in two directions, wherein two ends of the laser beam chopped by the blade member are irradiated to the processing target substrate as diffraction light.