The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2015

Filed:

Jul. 07, 2010
Applicants:

Jae-sang RO, Seoul, KR;

Won-eui Hong, Seoul, KR;

Inventors:

Jae-Sang Ro, Seoul, KR;

Won-Eui Hong, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/34 (2006.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); C23C 14/26 (2006.01); B32B 3/26 (2006.01); B32B 3/30 (2006.01); H01L 51/50 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0002 (2013.01); C23C 14/04 (2013.01); C23C 14/26 (2013.01); H01L 51/0013 (2013.01); B32B 3/266 (2013.01); B32B 3/30 (2013.01); H01L 51/5012 (2013.01); H01L 51/5048 (2013.01);
Abstract

Provided are a deposition substrate of a deposition apparatus, a method of forming a layer using the same, and a method of manufacturing an organic light emitting diode (OLED) display device. The method of forming a layer using the deposition substrate includes preparing a substrate, forming a heating conductive layer for Joule heating on the substrate, forming a first insulating layer on the heating conductive layer for Joule heating and including a groove or hole, forming a deposition material layer on a top surface of the first insulating layer having the groove or hole, and applying an electric field to the heating conductive layer for Joule heating to perform Joule-heating on the deposition material layer. Thus, the method is suitable for manufacturing a large-sized device.


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