The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Apr. 25, 2011
Applicants:
Shanzhong Wang, Singapore, SG;
Mui Hoon Nai, Singapore, SG;
Zhonglin Miao, Singapore, SG;
Inventors:
Assignee:
STMicroelectronics Asia Pacific Pte Ltd, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); B82Y 30/00 (2011.01); H01L 21/208 (2006.01); H01L 51/00 (2006.01); B82Y 10/00 (2011.01); G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0048 (2013.01); B82Y 10/00 (2013.01); G03F 7/0047 (2013.01);
Abstract
A nanotube-photoresist composite is fabricated by preparing a nanotube suspension using a nanotube structure-containing raw material, dispersing the nanotube suspension in a photoresist using ultra-sonication to produce a nanotube suspension-photoresist mix, spin-coating the nanotube suspension-photoresist mix on a substrate to form a nanotube suspension-photoresist composite layer, and removing one or more solvents in the nanotube suspension-photoresist composite layer by baking.