The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Jun. 17, 2011
Applicants:
Harunobu Matsui, Joetsu, JP;
Ryouhei Hasegawa, Joetsu, JP;
Masaki Takeuchi, Joetsu, JP;
Inventors:
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); G03F 7/16 (2006.01); G03F 7/42 (2006.01); H01L 21/00 (2006.01); G03F 1/00 (2012.01);
U.S. Cl.
CPC ...
G03F 7/168 (2013.01); G03F 7/422 (2013.01); B32B 38/10 (2013.01); H01L 21/00 (2013.01); G03F 1/14 (2013.01);
Abstract
A synthetic quartz glass substrate having a resist film coated thereon is treated by immersing it in a terpene-containing solvent until the resist film is released, and rinsing the substrate with water.