The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Apr. 21, 2008
Applicant:
Peter Van Der Meulen, Newburyport, MA (US);
Inventor:
Peter van der Meulen, Newburyport, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B65G 25/02 (2006.01); B25J 9/16 (2006.01); G05B 19/418 (2006.01); B65G 37/00 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B65G 25/02 (2013.01); B25J 9/161 (2013.01); G05B 19/41865 (2013.01); H01L 21/67276 (2013.01); H01L 21/67167 (2013.01); B65G 37/00 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01); Y10S 414/139 (2013.01); Y10S 706/904 (2013.01);
Abstract
A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits single-substrate pick-and-place operations while the batch end effector permits batch handling of substrates within a vacuum environment.