The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Dec. 30, 2010
Mark R. Erickson, Newbury Park, CA (US);
Aaron L. Dingus, Moorpark, CA (US);
Arthur W. Custer, Iii, Ventura, CA (US);
Henry J. Poole, Ventura, CA (US);
Nader Jamshidi, Newbury Park, CA (US);
Mark R. Erickson, Newbury Park, CA (US);
Aaron L. Dingus, Moorpark, CA (US);
Arthur W. Custer, III, Ventura, CA (US);
Henry J. Poole, Ventura, CA (US);
Nader Jamshidi, Newbury Park, CA (US);
Poole Ventura, Inc., Oxnard, CA (US);
Abstract
Preferably, obtaining internal and external thermal measurement values of a sealed process chamber allows a control system to generate a control signal based on a comparison of the internal and external thermal measurement values to the predetermined value. The control signal is provided to a fluid handling system, wherein the fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber. The control signal is further provided to a closed loop heat exchange system, wherein the closed loop heat exchange system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal. The control signal is still further provided to an open loop heat exchange system, wherein the open loop heat exchange system modulates flow of a third fluid within the interior of cavity of the sealed process chamber.