The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2015

Filed:

Nov. 22, 2007
Applicants:

Yuji Asahara, Kanawaga, JP;

Hideo Yamakoshi, Kanawaga, JP;

Minoru Danno, Kanawaga, JP;

Seiji Goto, Aichi, JP;

Akira Shirakura, Tokyo, JP;

Masaki Nakaya, Tokyo, JP;

Kiyoshi Hiroya, Aichi, JP;

Inventors:

Yuji Asahara, Kanawaga, JP;

Hideo Yamakoshi, Kanawaga, JP;

Minoru Danno, Kanawaga, JP;

Seiji Goto, Aichi, JP;

Akira Shirakura, Tokyo, JP;

Masaki Nakaya, Tokyo, JP;

Kiyoshi Hiroya, Aichi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H05H 1/24 (2006.01); B65D 23/02 (2006.01); C23C 16/04 (2006.01); C23C 16/509 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H05H 1/24 (2013.01); B65D 23/02 (2013.01); C23C 16/045 (2013.01); C23C 16/509 (2013.01); H01J 37/32348 (2013.01); H01J 37/32623 (2013.01);
Abstract

A barrier-film forming apparatus that forms a barrier film on an inner face of a container having a concave or convex portion as a processing target, including: a dielectric member having a cavity sized to enclose the container, an external electrode covering an outer circumference of the dielectric member, an exhaust unit installed on an end face of the external electrode on a side where a mouth of the container is located, with an insulating member interposed therebetween, and depressurizing inside of the container through an exhaust pipe, an internal electrode inserted from a side of the exhaust pipe and also serving as a gas blowout unit that blows out medium gas for generating a barrier film into the container, and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode and a ground electrode.


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