The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Sep. 14, 2007
Applicants:
Tommi Riekkinen, Lohja, FI;
Tomi Mattila, Espoo, FI;
Inventors:
Tommi Riekkinen, Lohja, FI;
Tomi Mattila, Espoo, FI;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 4/00 (2006.01); H01G 7/00 (2006.01); H01G 7/06 (2006.01); H01L 49/02 (2006.01); H01L 41/29 (2013.01); H01L 41/187 (2006.01); H01L 41/312 (2013.01);
U.S. Cl.
CPC ...
H01G 7/06 (2013.01); H01L 28/55 (2013.01); H01L 41/29 (2013.01); H01L 41/1871 (2013.01); H01L 41/312 (2013.01);
Abstract
A fabrication method for parallel-plate structures and a parallel-plate structure arrangement, wherein the structures have a middle layer, grown on a substrate and disposed between top and bottom electrode layers, wherein the middle layer and the top and bottom electrode layers are deposited on a bottom substrate, and wherein the middle layer is grown first and the top and bottom electrodes are essentially deposited afterwards.