The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 03, 2015

Filed:

Nov. 24, 2009
Applicants:

David J. Norris, Zurich, CH;

Sang Eon Han, Cambridge, MA (US);

Aditya Bhan, Minneapolis, MN (US);

Prashant Nagpal, Los Alamos, NM (US);

Nathan Charles Lindquist, Vadnais Heights, MN (US);

Sang-hyun OH, Plymouth, MN (US);

Inventors:

David J. Norris, Zurich, CH;

Sang Eon Han, Cambridge, MA (US);

Aditya Bhan, Minneapolis, MN (US);

Prashant Nagpal, Los Alamos, NM (US);

Nathan Charles Lindquist, Vadnais Heights, MN (US);

Sang-Hyun Oh, Plymouth, MN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/28 (2006.01); H01L 51/50 (2006.01); H01L 51/52 (2006.01); B81C 99/00 (2010.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B81C 99/009 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01);
Abstract

The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.


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