The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2015
Filed:
Jan. 11, 2011
Joseph Seeger, Menlo Park, CA (US);
Chiung C. Lo, Campbell, CA (US);
Baris Cagdaser, Sunnyvale, CA (US);
Derek Shaeffer, Redwood City, CA (US);
Joseph Seeger, Menlo Park, CA (US);
Chiung C. Lo, Campbell, CA (US);
Baris Cagdaser, Sunnyvale, CA (US);
Derek Shaeffer, Redwood City, CA (US);
Invensense, Inc., San Jose, CA (US);
Abstract
A micromachined magnetic field sensor is disclosed. The micromachined magnetic field sensor includes a substrate; and a drive subsystem partially supported by the substrate with a plurality of beams, and at least one anchor; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field vector along a third axis. The micromachined magnetic field sensor also includes a position transducer to detect the motion of the drive subsystem and an electrostatic offset cancellation mechanism coupled to the drive subsystem.