The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2015
Filed:
May. 18, 2004
Peter Zink, Aachen, DE;
Joseph Robert Rene Pankert, Aachen, DE;
Guenther Hans Derra, Aachen, DE;
Achim Weber, Aachen, DE;
Peter Zink, Aachen, DE;
Joseph Robert Rene Pankert, Aachen, DE;
Guenther Hans Derra, Aachen, DE;
Achim Weber, Aachen, DE;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
A method of cleaning at least one optical component of at least one irradiation device having at least one radiation source in a vacuum chamber. The source generates in particular extreme ultraviolet and/or soft X-ray radiation whose rays are guided via the optical component onto a workpiece to be treated, during which the optical component is at least partly polluted because of an inorganic substance introduced by the radiation source. A least one reaction partner that is substantially translucent or transparent to the rays is introduced via a feeder device in dependence on the prevailing reaction conditions. The reaction partner reacts chemically with the polluting deposits so as to remove them from the optical component.