The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2015
Filed:
Apr. 04, 2013
Applicant:
Panasonic Corporation, Osaka, JP;
Inventors:
Takakiyo Harigai, Osaka, JP;
Yoshiaki Tanaka, Nara, JP;
Hideaki Adachi, Osaka, JP;
Eiji Fujii, Osaka, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H01L 41/00 (2013.01); H02N 2/00 (2006.01); G01P 3/44 (2006.01); H01L 41/047 (2006.01); C23C 14/00 (2006.01); C23C 14/08 (2006.01); H01L 41/09 (2006.01); B41J 2/14 (2006.01); G01C 19/5621 (2012.01); H01L 41/113 (2006.01); C23C 14/02 (2006.01); H01L 41/187 (2006.01); G01C 19/5628 (2012.01);
U.S. Cl.
CPC ...
H01L 41/1871 (2013.01); G01P 3/44 (2013.01); H01L 41/0477 (2013.01); C23C 14/0021 (2013.01); C23C 14/088 (2013.01); H01L 41/0973 (2013.01); B41J 2/14233 (2013.01); G01C 19/5621 (2013.01); H01L 41/1136 (2013.01); C23C 14/025 (2013.01); G01C 19/5628 (2013.01);
Abstract
A piezoelectric film comprising comprises a (NaBi)TiO—BaTiOlayer with a (110) orientation, where 0.30≦x≦0.46 and 0.51≦y≦0.62, and the (NaBi)TiO—BaTiOlayer has composition around a Morphotropic Phase Boundary.