The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Jul. 03, 2012
Applicants:
Kenichi Shiraishi, Saitama, JP;
Tomoharu Fujiwara, Ageo, JP;
Inventors:
Kenichi Shiraishi, Saitama, JP;
Tomoharu Fujiwara, Ageo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70341 (2013.01); G03F 7/2041 (2013.01);
Abstract
An exposure apparatus comprises a movable member that moves under a projection optical system while holding a substrate; and an immersion nozzle that has a supply port and forms a immersion region under the projection optical system by supplying a liquid to an image plane side of the projection optical system via the supply port. The supply port is provided to a lower surface of the immersion nozzle and the liquid is supplied downwardly from the supply port. A contact area of the immersion region with a surface of the substrate has a rhomboid shape.