The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Aug. 11, 2011
Pierre Blondy, Limoges, FR;
Stanis Courreges, Imbsheim, FR;
Arnaud Pothier, Condat sur Vienne, FR;
Jean-christophe Orlianges, Bugeat, FR;
Pierre Blondy, Limoges, FR;
Stanis Courreges, Imbsheim, FR;
Arnaud Pothier, Condat sur Vienne, FR;
Jean-Christophe Orlianges, Bugeat, FR;
Universite de Limoges, Limoges, FR;
Centre National de la Recherche Scientifique (CNRS), Paris, FR;
Abstract
The present invention relates to an microelectromechanical system () comprising: a base () comprising a substrate () and a substrate electrode (); a moveable beam (); a voltage generator () able to generate a potential difference between the beam () and the substrate electrode (); and at least one mechanical stop () connected to the beam and designed to make contact with the base () when a potential difference is applied between the beam () and the substrate electrode (), thereby defining an air-filled cavity () between the beam () and the substrate electrode (), characterized in that it furthermore comprises an electrical-charge blocking element () placed on the substrate (), said element facing the at least one mechanical stop () and being electrically connected to the beam ().