The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Jun. 17, 2013
Applicant:
The Boeing Company, Chicago, IL (US);
Inventor:
Pierre-Yves Delaunay, Santa Monica, CA (US);
Assignee:
The Boeing Company, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/18 (2006.01); H01L 21/301 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01); H01L 31/0304 (2006.01); H01L 31/0352 (2006.01); H01L 27/146 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14683 (2013.01); H01L 22/12 (2013.01); H01L 27/14601 (2013.01);
Abstract
Systems and methods for dry eteching a photodetector array based on InAsSb are provided. A method for fabricating an array of photodetectors includes receiving a pattern of an array of photodetectors formed from InAsSb, the pattern including at least one trench defined between adjacent photodetectors, and dry etching the at least one trench with a plasma including BrCland Ar.