The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Oct. 01, 2010
Kenji Hara, Tokyo, JP;
Atsushi Kobayashi, Tokyo, JP;
Hiroo Yokota, Tokyo, JP;
Hiroshi Morita, Tokyo, JP;
Seiichi Saito, Tokyo, JP;
Kenji Hara, Tokyo, JP;
Atsushi Kobayashi, Tokyo, JP;
Hiroo Yokota, Tokyo, JP;
Hiroshi Morita, Tokyo, JP;
Seiichi Saito, Tokyo, JP;
Adeka Corporation, Tokyo, JP;
Abstract
The present invention provides a coating liquid for forming an insulation film, which has a small shrinkage in the calcination step in water vapor and is not likely to cause cracking of a resulting silica coating film or detachment thereof from a semiconductor substrate; an insulation film using the same; and a method of producing a compound used in the same. The coating liquid of comprises an inorganic polysilazane whose ratio of a peak area at 4.5 to 5.3 ppm attributed to SiHgroup and SiHgroup with respect to a peak area at 4.3 to 4.5 ppm attributed to SiHgroup inH-NMR spectrum is 4.2 to 50; and an organic solvent. The insulation film is obtained using the coating liquid.