The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Sep. 01, 2011
Applicants:
Christoph Eggs, Rattenkirchen, DE;
Gudrun Henn, Ebenhausen, DE;
Werner Ruile, Munich, DE;
Guenter Scheinbacher, Baldham, DE;
Siegfried Menzel, Lausitz, DE;
Mario Spindler, Dresden, DE;
Inventors:
Christoph Eggs, Rattenkirchen, DE;
Gudrun Henn, Ebenhausen, DE;
Werner Ruile, Munich, DE;
Guenter Scheinbacher, Baldham, DE;
Siegfried Menzel, Lausitz, DE;
Mario Spindler, Dresden, DE;
Assignee:
Epcos AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); C23C 16/44 (2006.01); H03H 3/02 (2006.01); H01L 41/23 (2013.01); H01L 41/29 (2013.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
H03H 3/02 (2013.01); H01L 41/23 (2013.01); H01L 41/29 (2013.01); H01L 41/316 (2013.01);
Abstract
The microacoustic component has a substrate that has at least one layer (composed of a dielectric or piezoelectric material, and a metallic strip structure. The layer is composed of a dielectric or piezoelectric material and/or the metallic strip structure have/has been produced or can be produced by the atomic layer deposition method.