The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Sep. 23, 2011
Applicants:
Beung-hwa Jeong, Yongin, KR;
Kwang-nam Kim, Yongin, KR;
Gyoo-chul JO, Yongin, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/02 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); B08B 7/04 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B08B 3/02 (2013.01); B08B 3/08 (2013.01); B08B 7/04 (2013.01); H01L 21/67028 (2013.01); H01L 21/67051 (2013.01); H01L 21/67173 (2013.01); H01L 21/67178 (2013.01); H01L 21/6776 (2013.01);
Abstract
An apparatus for cleaning a substrate is disclosed. The apparatus includes a first chamber through which a substrate is conveyed, a second chamber where an oxide film formed on the substrate conveyed from the first chamber is removed; and a third chamber that discharges the substrate conveyed from the second chamber to the outside after rinsing the substrate, wherein the first chamber and the third chamber are disposed on top and on bottom.