The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2015

Filed:

Feb. 24, 2011
Applicants:

Shinji Shimizu, Osaka, JP;

Atsushi Kazuno, Osaka, JP;

Inventors:

Shinji Shimizu, Osaka, JP;

Atsushi Kazuno, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C08G 18/76 (2006.01); B24B 37/24 (2012.01); C08G 18/10 (2006.01); C08G 18/12 (2006.01); C08G 18/32 (2006.01); C08G 18/42 (2006.01); C08G 18/48 (2006.01); C08G 18/66 (2006.01); C08G 18/75 (2006.01); C08G 101/00 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
B24B 37/24 (2013.01); C08G 18/10 (2013.01); C08G 18/12 (2013.01); C08G 18/3206 (2013.01); C08G 18/4238 (2013.01); C08G 18/4854 (2013.01); C08G 18/6674 (2013.01); C08G 18/758 (2013.01); C08G 18/7621 (2013.01); C08G 2101/00 (2013.01); H01L 21/3212 (2013.01);
Abstract

An object of the invention is to provide a polishing pad which has a polishing layer with a phase-separated structure and can provide high polishing rate and high planarization property and with which scratching can be suppressed. The polishing pad comprises the polishing layer. The polishing layer comprises a product of curing reaction of a polyurethane-forming raw material composition containing: (A) an isocyanate-terminated prepolymer obtained by reaction of a prepolymer-forming raw material composition (a) containing an isocyanate component and a polyester-based polyol; (B) an isocyanate-terminated prepolymer obtained by reaction of a prepolymer-forming raw material composition (b) containing an isocyanate component and a polyether-based polyol; and a chain extender, wherein the product of curing reaction has a phase-separated structure.


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