The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 2015

Filed:

Mar. 12, 2013
Applicant:

Nikon Corporation, Tokyo, JP;

Inventor:

W. Thomas Novak, Redwood City, CA (US);

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/25 (2006.01); G01S 17/06 (2006.01); G01S 17/42 (2006.01); G01S 17/66 (2006.01);
U.S. Cl.
CPC ...
G01B 11/25 (2013.01); G01S 17/06 (2013.01); G01S 17/42 (2013.01); G01S 17/66 (2013.01);
Abstract

A measurement assembly () for measuring a feature (A) on a surface () includes a metrology system (), a mover assembly (), a pointer (), and a control system (). The metrology system () generates a measurement beam (), and the mover assembly () selectively adjusts the direction of the measurement beam (). The pointer () is handheld and generates a pointer beam () that can be selectively directed at the surface () to form a pointer spot () on the surface (). Further, the control system () controls the mover assembly () to move the direction of the measurement beam () until the measurement beam () is approximately directed at the pointer spot ().


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