The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 2015

Filed:

Aug. 16, 2011
Applicants:

Yasushi Urakami, Obu, JP;

Itaru Gunjishima, Aichi-gun, JP;

Ayumu Adachi, Toyota, JP;

Inventors:

Yasushi Urakami, Obu, JP;

Itaru Gunjishima, Aichi-gun, JP;

Ayumu Adachi, Toyota, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 23/02 (2006.01); C30B 29/36 (2006.01); C30B 23/00 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
C30B 29/36 (2013.01); C30B 23/002 (2013.01); H01L 29/1608 (2013.01); C30B 23/00 (2013.01);
Abstract

A manufacturing method of a SiC single crystal includes growing a SiC single crystal on a surface of a SiC seed crystal, which satisfies following conditions: (i) the SiC seed crystal includes a main growth surface composed of a plurality of sub-growth surfaces; (ii) among directions from an uppermost portion of a {0001} plane on the main growth surface to portions on a periphery of the main growth surface, the SiC seed crystal has a main direction in which a plurality of sub-growth surfaces is arranged; and (iii) an offset angle θof a k-th sub-growth surface and an offset angle θof a (k+1)-th sub-growth surface satisfy a relationship of θ<θ.


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