The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Jan. 20, 2014
Applicant:
Brooks Automation, Inc., Chelmsford, MA (US);
Inventors:
Christopher C. Kiley, Carlisle, MA (US);
Peter van der Meulen, Newburyport, MA (US);
Forrest T. Buzan, Dunstable, MA (US);
Paul E. Fogel, Somerville, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06K 9/40 (2006.01); H01L 21/68 (2006.01); G05B 19/02 (2006.01); B65G 25/02 (2006.01); B65G 37/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); G05B 19/02 (2013.01); B65G 25/02 (2013.01); B65G 37/00 (2013.01); H01L 21/67259 (2013.01); H01L 21/67742 (2013.01); H01L 21/67748 (2013.01); H01L 21/68 (2013.01); Y10S 901/09 (2013.01); Y10S 901/47 (2013.01);
Abstract
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.